Synthesis and Properties of a Photopatternable Lithium-Ion Conducting Solid Electrolyte

Abstract

One of the important considerations for the development of on-chip batteries is the need to photopattern the solid electrolyte directly on electrodes. Herein, the photopatterning of a lithium-ion conducting solid electrolyte is demonstrated by modifying a well-known negative photoresist, SU-8, with LiClO₄. The resulting material exhibits a room temperature ionic conductivity of 52 µS cm⁻¹ with a wide electrochemical window (>5 V). Half-cell galvanostatic testing of 3 µm thin films spin-coated on amorphous silicon validates its use for on-chip energy-storage applications. The modified SU-8 possesses excellent mechanical integrity, is thermally stable up to 250 °C, and can be photopatterned with micrometer-scale resolution. These results present a promising direction for the integration of electrochemical energy storage in microelectronics.

The photopatterning of a lithium-ion conducting solid electrolyte is demonstrated by modifying a negative photoresist, SU-8, with lithium salts. The patterned material exhibits good electrochemical properties with a room temperature ionic conductivity of 52 µS cm⁻¹, which is comparable to polymer solid electrolytes. The materials also demonstrate excellent mechanical integrity and thermal stability.

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